Fundamentals of microfabrication and nanotechnology / by Marc J. Madou.
Material type:
TextPublication details: Boca Raton, FL : CRC Press, c2012.Edition: 3rd edDescription: 3 vols. : various pagination : ill. (some col.) ; 29 cmISBN: - 142005516X
- 9781420055115 (v. 1)
- 9781420055191 (v. 2)
- 9781420055160 (v. 3)
- Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
- 621.3815 23 MAD/F
- TK7875 .M33 2012
- TEC027000 | TEC008070 | SCI077000
| Cover image | Item type | Current library | Home library | Collection | Shelving location | Call number | Materials specified | Vol info | URL | Copy number | Status | Notes | Date due | Barcode | Item holds | Item hold queue priority | Course reserves | |
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Technical Reference Book
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Central Library, IIT Bhubaneswar | Central Library, IIT Bhubaneswar | 621.3815 MAD/F (Browse shelf(Opens below)) | vol. 1. | Available | vol. 1. | 6027 | |||||||||||
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Technical Reference Book
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Central Library, IIT Bhubaneswar | Central Library, IIT Bhubaneswar | 621.3815 MAD/F (Browse shelf(Opens below)) | vol. 2. | Available | vol. 2. | 6028 | |||||||||||
|
Technical Reference Book
|
Central Library, IIT Bhubaneswar | Central Library, IIT Bhubaneswar | 621.3815 MAD/F (Browse shelf(Opens below)) | vol. 3. | Available | vol. 3. | 6029 |
Browsing Central Library, IIT Bhubaneswar shelves Close shelf browser (Hides shelf browser)
| 621.3815 LIA/P Power microelectronics : device and process technologies / | 621.3815 LIN/S Smart sensors and systems / | 621.3815 LU/C CMOS integrated circuit design for wireless power transfer / | 621.3815 MAD/F Fundamentals of microfabrication and nanotechnology / | 621.3815 MAD/F Fundamentals of microfabrication and nanotechnology / | 621.3815 MAD/F Fundamentals of microfabrication and nanotechnology / | 621.3815 MAD/F Fundamentals of microfabrication : the science of miniaturization / |
Includes bibliographical references and index.
v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology --
v. 2. Manufacturing techniques for microfabrication and nanotechnology --
v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.
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