Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Krockel, Veikko Lindroos.
Material type: TextLanguage: English Series: Publication details: London : Elsevier, c2015.Edition: 2nd edDescription: xxxvii, 787 pages : illustrations ; 29 cmISBN:- 9780323299657 (hbk.)
- 621.38152 TIL/H
Item type | Current library | Home library | Collection | Call number | Status | Date due | Barcode | Item holds | |
---|---|---|---|---|---|---|---|---|---|
Technical Reference Book | Central Library, IIT Bhubaneswar | Central Library, IIT Bhubaneswar | SMS | 621.38152 TIL/H (Browse shelf(Opens below)) | Available | 9005 |
Total holds: 0
Includes bibliographical references and index.
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