Handbook of silicon based MEMS materials and technologies / (Record no. 10336)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01394cam a22003615i 4500 |
| 001 - CONTROL NUMBER | |
| control field | 9005 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | IN-BhIIT |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20200131163944.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 150401s2015 ne a b 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780323299657 (hbk.) |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | IN-BhIIT |
| 041 ## - LANGUAGE CODE | |
| Language code of text | eng |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Book number | TIL/H |
| 245 00 - TITLE STATEMENT | |
| Title | Handbook of silicon based MEMS materials and technologies / |
| Statement of responsibility, etc | edited by Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Krockel, Veikko Lindroos. |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | London : |
| Name of publisher | Elsevier, |
| Year of publication | c2015. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xxxvii, 787 pages : |
| Other physical details(ill.) | illustrations ; |
| Dimensions(size) | 29 cm. |
| 490 1# - SERIES STATEMENT | |
| Series statement | Micro & nano technologies series |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc | Includes bibliographical references and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Microelectromechanical systems. |
| Topical Term | Microelectromechanical systems |
| General subdivision | Materials. |
| Topical Term | Silicon |
| General subdivision | Electric properties. |
| Topical Term | Microelectromechanical systems. |
| Topical Term | Microelectromechanical systems |
| General subdivision | Materials. |
| Topical Term | Silicon |
| General subdivision | Electric properties. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Markku, Tilli, |
| Relator term | author |
| Personal name | Motooka, Teruaki |
| Relator term | author |
| Personal name | Airaksinen, Veli-Matti |
| Relator term | author |
| Personal name | Franssila, Sami |
| Relator term | author |
| Personal name | Paulasto-Krockel, Mervi |
| Relator term | author |
| Personal name | Lindroos, Veikko |
| Relator term | author |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Technical Reference Book |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Not withdrawn | Not Lost | not damaged | SMS | Central Library, IIT Bhubaneswar | Central Library, IIT Bhubaneswar | 31/01/2020 | 621.38152 TIL/H | 9005 | 31/01/2020 | Technical Reference Book |