Fundamentals of microfabrication and nanotechnology / by Marc J. Madou.

By:

Madou, Marc J

Material type: Text

TextPublication details: Boca Raton, FL : CRC Press, c2012.Edition: 3rd edDescription: 3 vols. : various pagination : ill. (some col.) ; 29 cmISBN:

142005516X
9781420055115 (v. 1)
9781420055191 (v. 2)
9781420055160 (v. 3)

Other title:

Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology

Subject(s):

DDC classification:

621.3815 23 MAD/F

LOC classification:

TK7875 .M33 2012

Other classification:

TEC027000 | TEC008070 | SCI077000

Contents:

v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.

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Holdings
Item type	Current library	Home library	Call number	Status	Notes	Barcode
Technical Reference Book	Central Library, IIT Bhubaneswar	Central Library, IIT Bhubaneswar	621.3815 MAD/F (Browse shelf(Opens below))	Available	vol. 1.	6027
Technical Reference Book	Central Library, IIT Bhubaneswar	Central Library, IIT Bhubaneswar	621.3815 MAD/F (Browse shelf(Opens below))	Available	vol. 2.	6028
Technical Reference Book	Central Library, IIT Bhubaneswar	Central Library, IIT Bhubaneswar	621.3815 MAD/F (Browse shelf(Opens below))	Available	vol. 3.	6029

Total holds: 0

Includes bibliographical references and index.

v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology --
v. 2. Manufacturing techniques for microfabrication and nanotechnology --
v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.

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