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Fundamentals of microfabrication and nanotechnology /

Madou, Marc J.

Fundamentals of microfabrication and nanotechnology / Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology by Marc J. Madou. - 3rd ed. - Boca Raton, FL : CRC Press, c2012. - 3 vols. : various pagination : ill. (some col.) ; 29 cm.

Includes bibliographical references and index.

v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology --
v. 2. Manufacturing techniques for microfabrication and nanotechnology --
v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.

ISBN: 142005516X 9781420055115 (v. 1) 9781420055191 (v. 2) 9781420055160 (v. 3)

LCCN: 2011014406

Subjects--Topical Terms:
Microelectromechanical systems.
Nanoelectromechanical systems.
Microfluidics.
Solid-state physics.

LC Class. No.: TK7875 / .M33 2012

Dewey Class. No.: 621.3815 / MAD/F

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