Silicon micromachining (Record no. 3892)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00551nam a2200217Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 151211s9999 xx 000 0 und d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780521590549 |
| Classification number | 621.3815 |
| Book number | ELW/S |
| 100 ## - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Elwenspoek, M. (Miko) |
| 245 ## - TITLE STATEMENT | |
| Title | Silicon micromachining |
| Statement of responsibility, etc | by M. Elwenspoek and H.V. Jansen. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Cambridge ; England |
| Name of publisher | Cambridge University Press |
| Year of publication | 2004 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Silicon.; Micromachining.; Etching |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Jansen, H. V. |
| Koha item type | Technical Reference Book |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Not withdrawn | Not Lost | not damaged | Central Library, IIT Bhubaneswar | Central Library, IIT Bhubaneswar | 11/12/2015 | 621.3815 ELW/S | 3282 | 11/12/2015 | Technical Reference Book |