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Silicon micromachining

Elwenspoek, M. (Miko)

Silicon micromachining by M. Elwenspoek and H.V. Jansen. - Cambridge ; England Cambridge University Press 2004

ISBN: 9780521590549

Subjects--Topical Terms:
Silicon.; Micromachining.; Etching

Dewey Class. No.: 621.3815 / ELW/S

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