Plasma etching for CMOS device realization / (Record no. 10952)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00896nam a22002657a 4500 |
| 001 - CONTROL NUMBER | |
| control field | 9447 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | IN-BhIIT |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20200625120621.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 200625b ||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9781785480966 (hbk) |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | IN-BhIIT |
| 041 ## - LANGUAGE CODE | |
| Language code of text | eng |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.39732 |
| Book number | POS/P |
| 245 00 - TITLE STATEMENT | |
| Title | Plasma etching for CMOS device realization / |
| Statement of responsibility, etc | edited by Nicolas Posseme |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | UK : |
| Name of publisher | Elsevier, |
| Year of publication | 2017. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | x, 121 pages : |
| Other physical details(ill.) | illustrations ; |
| Dimensions(size) | 24 cm. |
| 490 1# - SERIES STATEMENT | |
| Series statement | Electronics engineering |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc | Includes bibliographical references. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Metal oxide semiconductors, Complementary |
| General subdivision | Design and construction. |
| Topical Term | Plasma etching. |
| Topical Term | Metal oxide semiconductors, Complementary |
| General subdivision | Design and construction. |
| Topical Term | Plasma etching. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Posseme, Nicolas, |
| Relator term | editor. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Technical Reference Book |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Not withdrawn | Not Lost | not damaged | SES | Central Library, IIT Bhubaneswar | Central Library, IIT Bhubaneswar | 25/06/2020 | 621.39732 POS/P | 9447 | 25/06/2020 | Technical Reference Book |