000			01524cam a22003614a 4500
001			16786538
005			20240705093738.0
008			110519s2012 flua b 001 0 eng
010			_a 2011014406 _z 2011014404 _z 2011014405
020			_a142005516X
020			_a9781420055115 (v. 1)
020			_a9781420055191 (v. 2)
020			_a9781420055160 (v. 3)
035			_a(OCoLC)ocn727047810
040			_aDLC _cDLC _dYDX _dYDXCP _dCDX _dCOO _dMYPMP _dDLC
042			_apcc
050	0	0	_aTK7875 _b.M33 2012
082	0	0	_a621.3815 _223 _bMAD/F
084			_aTEC027000 _aTEC008070 _aSCI077000 _2bisacsh
100	1		_aMadou, Marc J. _910101
245	1	0	_aFundamentals of microfabrication and nanotechnology / _cby Marc J. Madou.
246	3	0	_aSolid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
250			_a3rd ed.
260			_aBoca Raton, FL : _bCRC Press, _cc2012.
300			_a3 vols. : various pagination : _bill. (some col.) ; _c29 cm.
504			_aIncludes bibliographical references and index.
505	0		_av. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.
650		0	_aMicroelectromechanical systems. _91332
650		0	_aNanoelectromechanical systems. _910666
650		0	_aMicrofluidics. _9685
650		0	_aSolid-state physics. _9923
942			_2ddc _cTRB _01
999			_c4961 _d4961