000			01598 a2200229 4500
001			TB12773
003			IN-BhIIT
005			20260212234109.0
008			260212b |||||||| |||| 00| 0 eng d
020			_a9780323327374 (hbk.)
040			_aIN-BhIIT
041			_aeng
082			_a620.5 _bBHA/E
100			_aBhattacharyya, Bijoy _eAuthor _927242
245			_aElectrochemical micromachining for nanofabrication, MEMS and nanotechnology / _cBijoy Bhattacharyya
260			_aUSA : _bElesivier, _c2015.
300			_axxiii, 270 p. : _bill. ; _c30 cm.
504			_aIncludes bibliographical references. and index.
520			_aElectrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM.
650			_aNanotechnology
942			_cTB
999			_c15315 _d15315