TY  - BOOK
AU  - Freund,L.B.
AU  - Suresh,S.
TI  - Thin film materials: stress, defect formation, and surface evolution 
SN  - 9780521822817 (hbk.)
U1  - 621.38152 
PY  - 2003///
CY  - Cambridge,New York
PB  - Cambridge University Press
KW  - Thin films
N1  - Includes bibliographical references and indexes
ER  -