| 000 | 01505cam a22003134a 4500 | ||
|---|---|---|---|
| 999 |
_c9298 _d9298 |
||
| 001 | 13714948 | ||
| 003 | IN-BhIIT | ||
| 005 | 20190306172110.0 | ||
| 008 | 040910s2005 nyua b 001 0 eng | ||
| 020 | _a9780387233109 | ||
| 040 | _cOCLC | ||
| 042 | _apcc | ||
| 082 | 0 | 0 |
_a621.381 _222 _bSET/E |
| 100 |
_aSetter, Nava _94910 |
||
| 245 | 0 | 0 |
_aElectroceramic-based MEMS : _bfabrication-technology and applications / _cedited by Nava Setter. |
| 260 |
_aNew York : _bSpringer Science+Business Media, _cc2005. |
||
| 300 |
_axii, 414 p. : _bill. ; _c25 cm. |
||
| 490 | 1 |
_aThe Kluwer international series in: Electronic materials: science and technology ; _v9 |
|
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aMicroelectromechanical systems. _91332 |
|
| 700 | 1 |
_aSetter, N. _q(Nava), _d1949- _94911 |
|
| 830 | 0 |
_aElectronic materials: science & technology. _94912 |
|
| 942 |
_2ddc _cTRB |
||