000 | 00974cam a22002894a 4500 | ||
---|---|---|---|
001 | TB1537 | ||
003 | IN-BhIIT | ||
005 | 20240826152702.0 | ||
008 | 190912b ||||| |||| 00| 0 eng d | ||
020 | _a9780070487093 (pbk.) | ||
020 | _a007048709X (pbk.) | ||
020 | _a0072393912 (bpk.) | ||
040 | _aIN-BhIIT | ||
041 | _aeng | ||
082 | 0 | 0 |
_a621.381 _bHSU/M |
100 | 1 |
_aHsu, Tai-Ran. _eauthor _924468 |
|
245 | 1 | 0 |
_aMEMS and microsystems : _bdesign and manufacture / _cby Tai-Ran Hsu. _6 |
260 |
_aBoston ; _aNew Delhi : _bMcGraw-Hill, _c2012. |
||
300 |
_axii, 436 p. : _bill. ; _c24 cm. |
||
504 | _aIncludes bibliographical references and index. | ||
650 | 0 |
_aMicroelectronics. _97137 |
|
650 | 0 |
_aMicroelectromechanical systems. _91332 |
|
650 | 0 |
_aMicroelectronic packaging. _99310 |
|
856 | 4 | 2 | _uhttp://www.loc.gov/catdir/description/mh021/2001044737.html |
856 | 4 | 1 | _uhttp://www.loc.gov/catdir/toc/mh021/2001044737.html |
942 |
_014 _cTB |
||
999 |
_c871 _d871 |