000			00789nam a2200241Ia 4500
008			151216s9999 xx 000 0 und d
020			_a9780849308260
082			_222
082			_a621.3815
082			_bMAD/F
100			_aMadou, Marc J. _910101
245			_aFundamentals of microfabrication :
245			_b the science of miniaturization /
245			_cby Marc J. Madou.
250			_a2nd ed.
260			_aBoca Raton :
260			_bCRC Press,
260			_c2008.
504			_aIncludes indexes.
650			_aMicroelectronics. ; Integrated circuits -- Design and construction. ; Microelectromechanical systems -- Design and construction. ; Machining. ; Microelectronic packaging. ; Lasers -- Industrial applications _910102
942			_2ddc _03
942			_cTB
999			_c5392 _d5392