Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Krockel, Veikko Lindroos.

Contributor(s):

Markku, Tilli [author]
Motooka, Teruaki [author]
Airaksinen, Veli-Matti [author]
Franssila, Sami [author]
Paulasto-Krockel, Mervi [author]
Lindroos, Veikko [author]

Material type: Text

TextLanguage: English Series: Publication details: London : Elsevier, c2015.Edition: 2nd edDescription: xxxvii, 787 pages : illustrations ; 29 cmISBN:

9780323299657 (hbk.)

Subject(s):

Microelectromechanical systems
Microelectromechanical systems -- Materials
Silicon -- Electric properties
Microelectromechanical systems
Microelectromechanical systems -- Materials
Silicon -- Electric properties

DDC classification:

621.38152 TIL/H

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Holdings
Item type	Current library	Home library	Collection	Call number	Status	Date due	Barcode	Item holds
Technical Reference Book	Central Library, IIT Bhubaneswar	Central Library, IIT Bhubaneswar	SMS	621.38152 TIL/H (Browse shelf(Opens below))	Available		9005

Total holds: 0

Includes bibliographical references and index.

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