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	1.	Fundamentals of microfabrication and nanotechnology / by Marc J. Madou. by Madou, Marc J Edition: 3rd ed. Material type: Text; Format: print ; Literary form: Not fiction Publication details: Boca Raton, FL : CRC Press, c2012 Other title: Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology Availability: Items available for loan: Central Library, IIT Bhubaneswar (3)Call number: 621.3815 MAD/F, ... Place hold
	2.	Fundamentals of microfabrication : the science of miniaturization / by Marc J. Madou. by Madou, Marc J Edition: 2nd ed. Material type: Text; Format: print ; Literary form: Not fiction Publication details: Boca Raton : ; CRC Press, ; 2008 Availability: Items available for loan: Central Library, IIT Bhubaneswar (2)Call number: 621.3815 MAD/F, ... Place hold

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