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MEMS and microsystems : design and manufacture / by Tai-Ran Hsu. by
Material type: Text; Format:
print
; Literary form:
Not fiction
Language: English
Publication details: Boston ; New Delhi : McGraw-Hill, 2012
Availability: Items available for loan: Central Library, IIT Bhubaneswar (17)Call number: 621.381 HSU/M, .. . Items available for reference: Central Library, IIT Bhubaneswar: Not for loan (1)Call number: 621.381 HSU/M .
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Fundamentals of microelectromechanical systems (MEMS) / by Eun Sok Kim. by
Material type: Text; Format:
print
; Literary form:
Not fiction
Language: English
Publication details: New Delhi : McGraw Hill, 2021
Availability: Items available for loan: Central Library, IIT Bhubaneswar (7)Call number: 621.381 KIM/F, .. . Items available for reference: Central Library, IIT Bhubaneswar: Not for loan (1)Call number: 621.381 KIM/F . Not available: Central Library, IIT Bhubaneswar: Checked out (2).
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Fundamentals of microfabrication and nanotechnology / by Marc J. Madou. by
Edition: 3rd ed.
Material type: Text; Format:
print
; Literary form:
Not fiction
Publication details: Boca Raton, FL : CRC Press, c2012
Other title: Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
Availability: Items available for loan: Central Library, IIT Bhubaneswar (2)Call number: 621.3815 MAD/F, .. . Not available: Central Library, IIT Bhubaneswar: Checked out (1).
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