TY  - BOOK
AU  - Sze,S.M.
TI  - VLSI technology / 
SN  - 9780070582910 (pbk.)
U1  - 621.381 
PY  - 1988///.
CY  - New York ; , New Delhi : 
PB  - McGraw-Hill, 
KW  - Integrated circuits
KW  - Very large scale integration
N1  - Includes bibliographies and index
UR  - http://www.loc.gov/catdir/description/mh022/87022803.html 
UR  - http://www.loc.gov/catdir/toc/mh021/87022803.html 
ER  -