TY  - BOOK
AU  - Lang, Jeffrey H.
TI  - Multi-wafer rotating MEMS machines : : turbines, generators and engines / 
SN  - 9780387777467
U1  - 621.381 22
PY  - 2009///
CY  - New York : 
PB  - Springer, 
KW  - Microelectromechanical systems
N1  - Include Index
ER  -