Lang, Jeffrey H. <br/><br/>
Multi-wafer rotating MEMS machines :   turbines, generators and engines /  
by Jeffrey H. Lang. 
 - New York :   Springer,   2009. 
 - xv, 456 p. : ill. ; 25 cm. 
<br/><br/>Include Index 
<br/><br/><label>ISBN: </label>9780387777467   
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381  / LAN/M