Liu, Ai-Qun Photonic MEMS Devices : Design, Fabrication and Control / by Ai-Qun Liu. - Boca Raton : CRC Press, 2008. - 483p. : 24cm. Includes Bibliography ISBN: 9781420045680 P89.00 Subjects--Topical Terms: Photonics ; Microelectromechanical system Dewey Class. No.: 621.381 / LIU/P