Liu, Ai-Qun

Photonic MEMS Devices : Design, Fabrication and Control / by Ai-Qun Liu. - Boca Raton : CRC Press, 2008. - 483p. : 24cm.

Includes Bibliography

9781420045680 P89.00


Photonics ; Microelectromechanical system

621.381 / LIU/P