TY  - BOOK
AU  - Madou,Marc J.
TI  - Fundamentals of microfabrication and nanotechnology
SN  - 142005516X
AV  - TK7875 .M33 2012
U1  - 621.3815 23
PY  - 2012///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Nanoelectromechanical systems
KW  - Microfluidics
KW  - Solid-state physics
N1  - Includes bibliographical references and index; v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- 
v. 2. Manufacturing techniques for microfabrication and nanotechnology -- 
v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications
ER  -