TY  - BOOK
AU  - Ghandhi, Sorab Khushro
TI  - VLSI fabrication principles : : silicon and gallium arsenide / 
SN  - 9788126517909
U1  - 621.3815 
PY  - 1994///.
CY  - New York : 
PB  - John Sons. & Wiley, 
KW  - Integrated circuits--Very large scale integration
KW  - Silicon
KW  - Gallium arsenide
N1  - Includes bibliographical references and index
ER  -