Elwenspoek, M. (Miko) <br/><br/>
Silicon micromachining  
by M. Elwenspoek and H.V. Jansen. 
 - Cambridge ; England  Cambridge University Press  2004 
<br/><br/><label>ISBN: </label>9780521590549 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon.; Micromachining.; Etching
<br/><br/><label>Dewey Class. No.: </label>621.3815  / ELW/S