Ohring, Milton.

Materials science of thin films : deposition and structure / by Milton Ohring. - 2nd ed. - Carlifornia : Academic Press, 2010. - xxi, 781 p. : ill. ; 24 cm.

Includes bibliographical references and index.

9788131202791


Surface engineering.
Thin Films.
Vacuum Science.

621.38152 / OHR/M