Ohring, Milton. Materials science of thin films : deposition and structure / by Milton Ohring. - 2nd ed. - Carlifornia : Academic Press, 2010. - xxi, 781 p. : ill. ; 24 cm. Includes bibliographical references and index. ISBN: 9788131202791 Subjects--Topical Terms: Surface engineering.Thin Films.Vacuum Science. Dewey Class. No.: 621.38152 / OHR/M