Kim, Eun Sok, <br/><br/>
Fundamentals of microelectromechanical systems (MEMS) / 
by Eun Sok Kim. 
 - New Delhi :  McGraw Hill,  2021. 
 - xviii, 396 pages :  ill. ;  25 cm 
<br/><br/> Minimal Level Cataloging Plus. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9789354601224 9354601227 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Electrical engineering.
<br/><br/><label>Dewey Class. No.: </label>621.381  / KIM/F