TY - BOOK AU - Krishna, Braj AU - Das, Kaushik AU - Roy, Amritendu TI - Synthesis and nanomechanical characterization of piezoelectric nanocomposite films for applications in energy harvesting MEMS devices U1 - 620.118 PY - 2022/// CY - Bhubaneswar : PB - IIT BBS, KW - Nanocomposite films KW - Lithography N1 - Including references ER -