May, Gary S. <br/><br/>
Fundamentals of semiconductor fabrication / 
Gary S. May and Simon M. Sze. 
 - New York :  Wiley,  c2004. 
 - xiii, 305 p. :  ill. ;  26 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9789812530721 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction.<br/>Integrated circuits--Design and construction.
<br/><br/><label>Dewey Class. No.: </label>621.38152  / MAY/F