Handbook of silicon based MEMS materials and technologies / 
edited by Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Krockel, Veikko Lindroos. 
 - 2nd ed. 
 - London :  Elsevier,  c2015. 
 - xxxvii, 787 pages :  illustrations ;  29 cm. 
 - Micro & nano technologies series .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780323299657 (hbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Microelectromechanical systems--Materials.<br/>Silicon--Electric properties.<br/>Microelectromechanical systems.<br/>Microelectromechanical systems--Materials.<br/>Silicon--Electric properties.
<br/><br/><label>Dewey Class. No.: </label>621.38152  / TIL/H