TY  - BOOK
AU  - Choudhary,Vikas
AU  - Iniewski,Krzysztof
TI  - MEMS : : fundamental technology and applications / 
T2  - Devices, circuits, and systems 
SN  - 9781466515819
U1  - 621.381 
KW  - Microelectromechanical systems.
KW  - Microelectronic packaging
KW  - MEDICAL / Biotechnology
KW  - TECHNOLOGY & ENGINEERING / Electronics / Circuits / General
KW  - TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS
N1  - Includes bibliographical references and index.
N2  - "Written by international experts, this book presents the latest research in the field of MEMS technology and the myriad applications that it has enabled. The text covers automotive, consumer, communication, and medical applications of MEMs. Some of the applications discussed include high-precision on-chip integrated oscillators for reference generations, gyroscopes in cameras for optical image stabilization, radio communication, bio-implantable kidneys, and mobile phones. Other chapters address MEMS packaging and MEMS resonators, providing a fundamental understanding to enable novel applications. There is also a chapter outlining the historical evolution of current nano micro systems"--
ER  -