TY  - BOOK
AU  - Setter, Nava
AU  - Setter,N.
TI  - Electroceramic-based MEMS: fabrication-technology and applications 
T2  - The Kluwer international series in: Electronic materials: science and technology
SN  - 9780387233109
U1  - 621.381 22
PY  - 2005///
CY  - New York
PB  - Springer Science+Business Media
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -