TY  - BOOK
AU  - Senturia,Stephen D.
TI  - Microsystem design
SN  - 9788181285461 (pbk.)
AV  - TK7875 .S46 2000
U1  - 621.381 21
PY  - 2001///
CY  - Boston, New Delhi
PB  - Kluwer Academic Publishers, Springer
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - System design
KW  - Microelectronics
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0821/00048768-d.html
UR  - http://www.loc.gov/catdir/enhancements/fy0821/00048768-t.html
ER  -