Senturia, Stephen D., <br/><br/>
Microsystem design / 
by Stephen D. Senturia. 
 - Boston /  New Delhi :  Kluwer Academic Publishers /  Springer,  c2001. 
 - xxvi, 689 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9788181285461 (pbk.) 8181285468 (pbk.) 0792372468 (pbk.) 
<br/><br/><label>LCCN: </label>00048768  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction.<br/>System design.<br/>Microelectronics.
<br/><br/><label>LC Class. No.: </label>TK7875  / .S46 2000 
<br/><br/><label>Dewey Class. No.: </label>621.381  / SEN/M