TY  - BOOK
AU  - Zetterling, Carl-Mikael
TI  - Process technology for silicon carbide devices / 
SN  - 9780852969984
U1  - 621.38152 22
PY  - 2002///
CY  - London : 
PB  - INSPEC, 
KW  - Silicon carbide -- Electric properties
N1  - Include Index
ER  -