TY - BOOK AU - Wong, Basil T. AU - Menguc, M. Pinar TI - Thermal transport for applications in micro/nanomachining T2 - Microtechnology and MEMS SN - 9783642092749 U1 - 671.35 PY - 2008/// CY - New York PB - Springer KW - Nanotechnology KW - Machining N1 - Including references and index ER -