Wong, Basil T.

Thermal transport for applications in micro/nanomachining / Basil T. Wong and M. Pinar Menguc - New York : Springer, 2008. - xvii, 231 p. : ill. ; 23 cm. - Microtechnology and MEMS .

Including references and index.

9783642092749


Nanotechnology
Machining

671.35 / WON/T