TY  - BOOK
AU  - Markku,Tilli
AU  - Motooka,Teruaki
AU  - Airaksinen,Veli-Matti
AU  - Franssila,Sami
AU  - Paulasto-Krockel,Mervi
AU  - Lindroos,Veikko
TI  - Handbook of silicon based MEMS materials and technologies
T2  - Micro & nano technologies series
SN  - 9780323299657 (hbk.)
U1  - 621.38152 
PY  - 2015///
CY  - London
PB  - Elsevier
KW  - Microelectromechanical systems
KW  - Materials
KW  - Silicon
KW  - Electric properties
N1  - Includes bibliographical references and index
ER  -