May, Gary S Fundamentals of semiconductor fabrication / Gary S May and Simon M. Sze - New Delhi : Wiley, c2004. - xiii, 305p. ; 24 cm. ISBN: 9788126532605 Subjects--Topical Terms: SemiconductorsSemiconductor FabricationSemiconductors Design and construction Dewey Class. No.: 621.38152 / MAY/F