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Microsystem design / by Stephen D. Senturia.

By: Material type: TextTextPublication details: Boston / New Delhi : Kluwer Academic Publishers / Springer, c2001.Description: xxvi, 689 p. : ill. ; 24 cmISBN:
  • 9788181285461 (pbk.)
  • 8181285468 (pbk.)
  • 0792372468 (pbk.)
Subject(s): DDC classification:
  • 621.381 21 SEN/M
LOC classification:
  • TK7875 .S46 2000
Online resources:
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Includes bibliographical references and index.

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