Multi-wafer rotating MEMS machines : turbines, generators and engines / by Jeffrey H. Lang.
Material type: TextPublication details: New York : Springer, 2009.Description: xv, 456 p. : ill. ; 25 cmISBN:- 9780387777467
- 621.381 22 LAN/M
Item type | Current library | Home library | Call number | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|---|
Technical Reference Book | Central Library, IIT Bhubaneswar | Central Library, IIT Bhubaneswar | 621.381 LAN/M (Browse shelf(Opens below)) | Available | 6781 |
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621.381 KIM/F Fundamentals of microelectromechanical systems (MEMS) / | 621.381 KIM/F Fundamentals of microelectromechanical systems (MEMS) / | 621.381 KOT/B Basic electronic / | 621.381 LAN/M Multi-wafer rotating MEMS machines : | 621.381 LIM/P Practical problems in vlsi physical design automation | 621.381 LIU/P Photonic MEMS Devices : | 621.381 LIU/P Photonic MEMS Devices : |
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