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  • Microelectronics. ; Integrated circuits -- Design and construction. ; Microelectromechanical systems -- Design and construction. ; Machining. ; Microelectronic packaging. ; Lasers -- Industrial applications

Microelectronics. ; Integrated circuits -- Design and construction. ; Microelectromechanical systems -- Design and construction. ; Machining. ; Microelectronic packaging. ; Lasers -- Industrial applications (Topical Term)

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Preferred form: Microelectronics. ; Integrated circuits -- Design and construction. ; Microelectromechanical systems -- Design and construction. ; Machining. ; Microelectronic packaging. ; Lasers -- Industrial applications

Machine generated authority record.

Work cat.: (IN-BhIIT)5392: Madou, Marc J. 10101, Fundamentals of microfabrication :

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