MEMS and microsystems : design and manufacture /
Hsu, Tai-Ran.
MEMS and microsystems : design and manufacture / by Tai-Ran Hsu. - Boston ; New Delhi : McGraw-Hill, 2012. - xii, 436 p. : ill. ; 24 cm.
Includes bibliographical references and index.
9780070487093 (pbk.) 007048709X (pbk.) 0072393912 (bpk.)
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.
621.381 / HSU/M
MEMS and microsystems : design and manufacture / by Tai-Ran Hsu. - Boston ; New Delhi : McGraw-Hill, 2012. - xii, 436 p. : ill. ; 24 cm.
Includes bibliographical references and index.
9780070487093 (pbk.) 007048709X (pbk.) 0072393912 (bpk.)
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.
621.381 / HSU/M