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Multi-wafer rotating MEMS machines :

Lang, Jeffrey H.

Multi-wafer rotating MEMS machines : turbines, generators and engines / by Jeffrey H. Lang. - New York : Springer, 2009. - xv, 456 p. : ill. ; 25 cm.

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ISBN: 9780387777467

Subjects--Topical Terms:
Microelectromechanical systems

Dewey Class. No.: 621.381 / LAN/M

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