Microsystem technology and microrobotics /
Fatikow, S.
Microsystem technology and microrobotics / by S. Fatikow. - Berlin : Springer, 1997. - xii, 408 p. : ill. ;
Includes Index.
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
9783540606581
Electromechanical devices - Design and construction
629.892 / FAT/M
Microsystem technology and microrobotics / by S. Fatikow. - Berlin : Springer, 1997. - xii, 408 p. : ill. ;
Includes Index.
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
9783540606581
Electromechanical devices - Design and construction
629.892 / FAT/M