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Photonic MEMS Devices :

Liu, Ai-Qun

Photonic MEMS Devices : Design, Fabrication and Control / by Ai-Qun Liu. - Boca Raton : CRC Press, 2008. - 483p. : 24cm.

Includes Bibliography

ISBN: 9781420045680 P89.00

Subjects--Topical Terms:
Photonics ; Microelectromechanical system

Dewey Class. No.: 621.381 / LIU/P

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