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VLSI fabrication principles :

Ghandhi, Sorab Khushro

VLSI fabrication principles : silicon and gallium arsenide / by Sorab K. Ghandhi. - 2nd ed. - New York : John Sons. & Wiley, c1994. - xxiv, 834 p. : illustrations ; 25 cm.

Includes bibliographical references and index

ISBN: 9788126517909

Subjects--Topical Terms:
Integrated circuits--Very large scale integration
Silicon
Gallium arsenide

Dewey Class. No.: 621.3815 / GHA/V

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